JPH0429659U - - Google Patents

Info

Publication number
JPH0429659U
JPH0429659U JP6953390U JP6953390U JPH0429659U JP H0429659 U JPH0429659 U JP H0429659U JP 6953390 U JP6953390 U JP 6953390U JP 6953390 U JP6953390 U JP 6953390U JP H0429659 U JPH0429659 U JP H0429659U
Authority
JP
Japan
Prior art keywords
reaction chamber
discharge electrode
roll
metal body
flexible metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6953390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6953390U priority Critical patent/JPH0429659U/ja
Publication of JPH0429659U publication Critical patent/JPH0429659U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6953390U 1990-06-28 1990-06-28 Pending JPH0429659U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6953390U JPH0429659U (en]) 1990-06-28 1990-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6953390U JPH0429659U (en]) 1990-06-28 1990-06-28

Publications (1)

Publication Number Publication Date
JPH0429659U true JPH0429659U (en]) 1992-03-10

Family

ID=31604918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6953390U Pending JPH0429659U (en]) 1990-06-28 1990-06-28

Country Status (1)

Country Link
JP (1) JPH0429659U (en])

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